Scanning Electron Microscope

Scanning electronic microscope VEGA3 LMU is used for observations samples with the resolution up to 10 nm. It can be used for surface quality assessment (grooves, scratches), measurement of structures on surfaces or determination of particle dimensions. By the method of Electron Energy-Dispersive spectroscopy an elemental composition on the sample surface can be determined, including line and areal mapping. The last one can be used, for example, to assess homogeneity of sample coverage or measurement of layer thickness (if cross-cut is possible).

Sample requirements

  • max. lateral size of 14 cm, height below 5 cm
  • optimal is a conductive sample or sample that can be covered by a conductive layer( gold, carbon, etc.)
  • sample must be fixed for not moving during observation
  • dry clean sample resistant to vacuum


Image of sintered metal material obtained with a magnification of 5000. Next image is elemental mapping (tungsten green, cobalt red).

Image of metal wool obtained with magnification of 566. In comparison with the classical optical microscope and it allows obtaining higher depth of focus. Next image - observed by red-blue glasses - has a 3D look.

Technical specifications and measurement abilities

  • imaging measurement modes: secondary electrons (SE), back-scattered electrons (BSE), transmitted electrons (STEM)
  • elemental analysis: resolution approximately 130 eV, point, areal, line and areal mapping
  • accelerating voltage: 1 up to 30 kV
  • ability to perform measurement in low vacuum (about 100 Pa)
  • stage for 7 samples